Chalcogenide Laser Scribing Etching Machine (P1, P2, P3 scribing and etching; P4 edge cleaning)
Equipment model

SE-P(X)

Effective working width

500mm×500mm (on request)

Maximum running speed

2000mm/s(P1-P3),200mm/s(P4)

Repeatable positioning accuracy

±10μm/500mm

Straightness of marking lines

±10μm/500mm

Film line width (P1-P3)

30~60μm

Clear edge width (P4)

5~20mm

Total width of three line edge

300~500μm

Laser type

Selected according to process requirements